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Translation stage MS15XYpiezoelectric2-axis
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Characteristics
- Orientation
- translation, XY
- Type
- piezoelectric
- Number of axes
- 2-axis
- Other characteristics
- miniature, vacuum-compatible
- Stroke
3 mm
(0.118 in)- Speed
1.5 mm/s
Description
for high vacuum conditions up to 10^(-6) mbar
3.5 mm travel in x and y direction
15 x 15 mm footprint
Ultra small miniature translation stages with piezo electic inertial drive. Vacuum edition of MS15.
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