Vacuum-compatible positioning stages

Stroke : 50 mm
Speed: 100 m/s
Repeatability: 0.2 µm

... degrees of freedom stages Short Description: Features: High precision, can be assembled, can be customized, light aperture 460mm Delivers consistent and reliable motion accuracy in a compact and rugged stage ...

Stroke : 1 mm - 40 mm
Speed: 1 mm/s - 200 mm/s
Repeatability: 0.3 µm - 5 µm

... High Speed UHV Linear Axis Application: High resolution and fast scanning applications Benefit: Fast positioning in UHV, also vertically Features: Outstanding resolution, very slim, with internal ...

Stroke : 1 mm - 100 mm
Speed: 1 mm/s - 10 mm/s
Repeatability: 0.4 µm - 5 µm

... linear stage Application: Transport Stage, scanning stage for high loads Benefit: High life time despite dry lube Features: lead screw with dry lube or ball screw with liquid piezo ...

Stroke : 1 mm - 300 mm
Speed: 1 mm/s - 10 mm/s
Repeatability: 0.015 µm - 5 µm

... linear stage Application: scanning Benefit: Nanometer-positioning, also vertically Features: positioning with extreme resolution and highest stiffnes can be can be equipped with ...

Stroke : 26 mm
Speed: 20 mm/s
Repeatability: 40, 200 nm

... piezo stage show the dimensions and specifications of an SLC-1740 for atmospheric or HV environments, equipped with an S-position sensor. For technical drawings and detailed specifications of other variants, such as UHV ...

Stroke : 31 mm
Speed: 20 mm/s
Repeatability: 40, 200 nm

... piezo stage show the dimensions and specifications of an SLC-1750 for atmospheric or HV environments, equipped with an S-position sensor. For technical drawings and detailed specifications of other variants, such as UHV ...

Stroke : 41 mm
Speed: 20 mm/s
Repeatability: 40, 200 nm

... piezo stage show the dimensions and specifications of an SLC-1760 for atmospheric or HV environments, equipped with an S-position sensor. For technical drawings and detailed specifications of other variants, such as UHV ...

Stroke : 25 mm - 200 mm
Speed: 0 m/s - 0.1 m/s

... Series devices are vacuum compatible, computer-controlled, motorized linear stages with high thrust and speed capabilities and a compact size. They are stand-alone units requiring only ...

... -controlled, high- and low-vacuum, motorized linear stages with high stiffness, load, and lifetime capabilities in a compact size. They are stand-alone units requiring only a standard 24 V or 48 V power ...

Stroke : 20 mm - 40 mm
Speed: max 0.048 m/s

Zaber’s vacuum vertical stages (X-VSR-SV) with built-in controllers are compatible for high (10^-6 Torr) and low (10^-3 Torr) vacuum environments. The built-in controller ...

Stroke : 10 mm
Speed: 1 mm/s

... movement detection with a precision of 1nm and high repeatability. The linear stage is available as uniaxial, biaxial or triaxial positioning system for standard and vacuum conditions. ...

Stroke : 3 mm
Speed: 1.5 mm/s

for high vacuum conditions up to 10^(-6) mbar ultra compact design 3.5mm travel xyz – combination possible Ultra small miniature translation stages with piezo electic inertial drive. Vacuum ...

Stroke : 8 mm
Speed: 1.2 mm/s

for high vacuum conditions up to 10^(-6) mbar 8 mm travel at 30 x 30 mm footprint our all-rounder multi axes combinations without adapter plates Miniature translation stage with piezo electric ...