Vacuum-compatible positioning stages

Stroke : 1 mm - 40 mm
Speed: 1 mm/s - 200 mm/s
Repeatability: 0.3 µm - 5 µm

... High Speed UHV Linear Axis Application: High resolution and fast scanning applications Benefit: Fast positioning in UHV, also vertically Features: Outstanding resolution, very slim, with internal ...

Stroke : 1 mm - 100 mm
Speed: 1 mm/s - 10 mm/s
Repeatability: 0.4 µm - 5 µm

... linear stage Application: Transport Stage, scanning stage for high loads Benefit: High life time despite dry lube Features: lead screw with dry lube or ball screw with liquid piezo ...

Stroke : 1 mm - 300 mm
Speed: 1 mm/s - 10 mm/s
Repeatability: 0.015 µm - 5 µm

... linear stage Application: scanning Benefit: Nanometer-positioning, also vertically Features: positioning with extreme resolution and highest stiffnes can be can be equipped with ...

Stroke : 26 mm
Speed: 20 mm/s
Repeatability: 40, 200 nm

... piezo stage show the dimensions and specifications of an SLC-1740 for atmospheric or HV environments, equipped with an S-position sensor. For technical drawings and detailed specifications of other variants, such as UHV ...

Stroke : 31 mm
Speed: 20 mm/s
Repeatability: 40, 200 nm

... piezo stage show the dimensions and specifications of an SLC-1750 for atmospheric or HV environments, equipped with an S-position sensor. For technical drawings and detailed specifications of other variants, such as UHV ...

Stroke : 41 mm
Speed: 20 mm/s
Repeatability: 40, 200 nm

... piezo stage show the dimensions and specifications of an SLC-1760 for atmospheric or HV environments, equipped with an S-position sensor. For technical drawings and detailed specifications of other variants, such as UHV ...

Stroke : 25 mm - 200 mm
Speed: 0 m/s - 0.1 m/s

... Series devices are vacuum compatible, computer-controlled, motorized linear stages with high thrust and speed capabilities and a compact size. They are stand-alone units requiring only ...

... -controlled, high- and low-vacuum, motorized linear stages with high stiffness, load, and lifetime capabilities in a compact size. They are stand-alone units requiring only a standard 24 V or 48 V power ...

Stroke : 20 mm - 40 mm
Speed: max 0.048 m/s

Zaber’s vacuum vertical stages (X-VSR-SV) with built-in controllers are compatible for high (10^-6 Torr) and low (10^-3 Torr) vacuum environments. The built-in controller ...

Stroke : 10 mm
Speed: 1 mm/s

... movement detection with a precision of 1nm and high repeatability. The linear stage is available as uniaxial, biaxial or triaxial positioning system for standard and vacuum conditions. ...

Stroke : 3 mm
Speed: 1.5 mm/s

for high vacuum conditions up to 10^(-6) mbar ultra compact design 3.5mm travel xyz – combination possible Ultra small miniature translation stages with piezo electic inertial drive. Vacuum ...

Stroke : 8 mm
Speed: 1.2 mm/s

for high vacuum conditions up to 10^(-6) mbar 8 mm travel at 30 x 30 mm footprint our all-rounder multi axes combinations without adapter plates Miniature translation stage with piezo electric ...

Stroke : 30, 50, 100 mm
Speed: 5, 50 mm/s

... universally applicable micro stage that impresses above all with its high dynamics and speed. It is designed to achieve excellent running and positioning accuracies under extreme conditions, such as in ...

Stroke : 100, 50 mm
Speed: 5 mm/s
Repeatability: 0.5 µm - 4 µm

... high loads up to 10 kg The linear stage is designed to position loads with high rigidity under extreme conditions, such as in high vacuum and ultra-high vacuum. Equipped with a piezoelectric ...

Stroke : 60, 130 mm
Speed: 5 mm/s
Repeatability: 0.5 µm - 4 µm

• Vacuum: all ranges HV / UHV / EUV up to 10E-11 mbar • Lubrication liquid up to 10E-8 / dry up to 10E-11 mbar • Max. Bakeout temperature: 120°C • Available as magnetic version Optionally configurable: • ...

Stroke : 50 mm - 200 mm

... configurations available Non vacuum version Vacuum Compatible Motorized Stages are equipped with vacuum compatible stepper motor. Stages ...