Vacuum-compatible positioning stages

11 companies | 116 products
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linear stage
linear stage
Q-545 Q‑Motion® series

Stroke : 26, 13 mm
Speed: 8 mm/s
Repeatability: 100, 200 nm

... the drives acting directly on the runner and achieve velocities of max. 8 mm/s. Direct-measuring principle The linear stages are equipped with a noncontact measuring optical linear encoder and a reference switch. ​R​e​s​o​l​u​t​i​o​n​ ...

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Physik Instrumente
linear stage
linear stage
SLC-1740

Stroke : 26 mm
Speed: 20 mm/s
Repeatability: 40, 200 nm

... piezo stage show the dimensions and specifications of an SLC-1740 for atmospheric or HV environments, equipped with an S-position sensor. For technical drawings and detailed specifications of other variants, such as UHV ...

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SmarAct GmbH
linear stage
linear stage
SLC-1750

Stroke : 31 mm
Speed: 20 mm/s
Repeatability: 40, 200 nm

... piezo stage show the dimensions and specifications of an SLC-1750 for atmospheric or HV environments, equipped with an S-position sensor. For technical drawings and detailed specifications of other variants, such as UHV ...

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SmarAct GmbH
linear stage
linear stage
SLC-1760

Stroke : 41 mm
Speed: 20 mm/s
Repeatability: 40, 200 nm

... piezo stage show the dimensions and specifications of an SLC-1760 for atmospheric or HV environments, equipped with an S-position sensor. For technical drawings and detailed specifications of other variants, such as UHV ...

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SmarAct GmbH
linear stage
linear stage
DSP50

Stroke : 10 mm
Speed: 1 mm/s
Load: 115 g

... movement detection with a precision of 1nm and high repeatability. The linear stage is available as uniaxial, biaxial or triaxial positioning system for standard and vacuum conditions. The very compact ...

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mechOnics ag
linear positioning stage
linear positioning stage
MS15

Stroke : 3 mm
Speed: 1.5 mm/s
Load: 6 g

... for high vacuum conditions up to 10^(-6) mbar ultra compact design xyz – combination possible Ultra small miniature translation stages with piezo electic inertial drive. Vacuum edition of MS15. Technical ...

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mechOnics ag
linear positioning stage
linear positioning stage
MS30

Stroke : 8 mm
Speed: 1.2 mm/s
Load: 32 g

... for high vacuum conditions up to 10^(-6) mbar our all-rounder multi axes combinations without adapter plates Miniature translation stage with piezo electric inertial drive. Technical data Width - 30 mm Height ...

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mechOnics ag
linear positioning stage
linear positioning stage
DT-300

Stroke : 25 mm

... obtained with a rugged dovetail slide track.

Product Features

  • Rapid positioning
  • Stable dovetail design
  • Lockable
  • Vacuum compatible versions available upon request


Performance ...

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Siskiyou
linear stage
linear stage
X-LSM-SV series

Stroke : 25 mm - 200 mm
Speed: 0 m/s - 0.1 m/s

... Series devices are vacuum compatible, computer-controlled, motorized linear stages with high thrust and speed capabilities and a compact size. They are stand-alone units requiring only a standard 24 V ...

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Zaber Technologies - Vancouver, BC
linear positioning stage
linear positioning stage
LA92

Stroke : 1 mm - 40 mm
Speed: 1 mm/s - 200 mm/s
Repeatability: 0.3 µm - 5 µm

... High Speed UHV Linear Axis Application: High resolution and fast scanning applications Benefit: Fast positioning in UHV, also vertically Features: Outstanding resolution, very slim, with internal motor • Vacuum: ...

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Steinmeyer Holding GmbH
hexapod positioning stage
hexapod positioning stage
E-HEX-10.6.100

Stroke : 50 mm
Speed: 100 m/s
Repeatability: 0.2 µm

... degrees of freedom stages Short Description: Features: High precision, can be assembled, can be customized, light aperture 460mm Delivers consistent and reliable motion accuracy in a compact and rugged stage It has ...

translation stage
translation stage

Stroke : 50 mm - 200 mm

... configurations available Non vacuum version Vacuum Compatible Motorized Stages are equipped with vacuum compatible stepper motor. Stages ...

rotary stage
rotary stage
XRT-U 30

... The XRT-U 30 is a compact and precise rotation stage driven by an ultrasonic piezo motor. With the XRT-U 30, you can achieve error motions comparable to air bearing rotary stages, but in a smaller volume and for a lower ...

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Xeryon
vacuum-compatible stage
vacuum-compatible stage
MT105 series

Stroke : 30, 50, 100 mm
Speed: 5, 50 mm/s

... universally applicable micro stage that impresses above all with its high dynamics and speed. It is designed to achieve excellent running and positioning accuracies under extreme conditions, such as in high vacuum, ...

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Steinmeyer Mechatronik GmbH
XYZ positioning stage
XYZ positioning stage

Stroke : 10, 13 mm

... XYZ-piezo stage Piezo motor driven Travel 13 x 13 x 10 mm UHV compatible ...

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PM B.V.
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