Linear positioning stage MS15

motorizedpiezoelectricminiature

for high vacuum conditions up to 10^(-6) mbar ultra compact design xyz – combination possible Ultra small miniature translation stages with piezo electic inertial drive. Vacuum edition of MS15. Technical data Width - 15 mm Height - 7 mm Depth - 15 mm Velocity - 1.5 mm/s Max. load Momentum (Mx) - 4 Ncm Momentum (My) - 4 Ncm Momentum (Mz) - 4 Ncm Blocking force (Fx) - 3 N Bearing force (Fy, Fz) - 20 N Guidance accuracy Yaw angle - 20 arc sec Pitch angle - 60 arc sec Vertical deviation - 1 um Lateral deviation - 2 um