Linear positioning stage MS30piezoelectricmulti-axiswith ball bearing
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Characteristics
- Orientation
- linear
- Type
- piezoelectric
- Number of axes
- multi-axis
- Other characteristics
- precision, miniature, vacuum-compatible, with ball bearing
- Stroke
30 mm
(1.181 in)- Speed
1.2 mm/s
- Load
32 g
(1.13 oz)
Description
for high vacuum conditions up to 10^(-6) mbar
many mounting possibilities
our all-rounder
multi axes combinations without adapter plates
Miniature translation stage with piezo electric inertial drive.
Technical data
Width - 52 mm
Height - 12.5 mm
Depth - 30 mm
Max. load
Momentum (Mx) - 5 Ncm
Momentum (My) - 5 Ncm
Momentum (Mz) - 5 Ncm
Blocking force (Fx) - 4.5 N
Bearing force (Fy, Fz) - 30 N
Guidance accuracy
Yaw angle - 170 arc sec
Pitch angle - 170 arc sec
Vertical deviation - 3 um
Lateral deviation - 3 um
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