Translation stage MS30

piezominiature

for closed loop operation (resolution up to 50nm) multi axes combinations without adapter plates Miniature translation stage with piezo electric inertial drive with measuring system. Technical data Width - 52 mm Height - 12.5 mm Depth - 30 mm Velocity - 1.2 mm/s Max. load Momentum (Mx) - 5 Ncm Momentum (My) - 5 Ncm Momentum (Mz) - 5 Ncm Blocking force (Fx) - 4.5 N Bearing force (Fy, Fz) - 30 N Guidance accuracy Yaw angle - 170 arc sec Pitch angle - 160 arc sec Vertical deviation - 3 um Lateral deviation - 3 um Measurement Information Reference Mark - middle Resolution - 1um to 50 nm Supply Voltage - 5 V Power Consumption - 150 mA