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Linear positioning stage MS38
piezoelectricsingle-axisminiature

Linear positioning stage - MS38 - mechOnics ag - piezoelectric / single-axis / miniature
Linear positioning stage - MS38 - mechOnics ag - piezoelectric / single-axis / miniature
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Characteristics

Orientation
linear
Type
piezoelectric
Number of axes
single-axis
Other characteristics
miniature, vacuum-compatible
Stroke

8 mm
(0.315 in)

Speed

1.5 mm/s

Load

32 g
(1.13 oz)

Description

for high vacuum conditions up to 10^(-9) mbar free aperture of 10 mm for ray passage Miniature translastion stages with free opening dia 10mm and piezo electrical inertial drive. UHV edition of MS 38. Technical data Width - 38 mm Height - 9.5 mm Depth - 40 mm Max. load Momentum (Mx) - 4 Ncm Momentum (My) - 4 Ncm Momentum (Mz) - 4 Ncm Blocking force (Fx) - 4.5 N Bearing force (Fy, Fz) - 20 N Guidance accuracy Yaw angle - 20 arc sec Pitch angle - 60 arc sec Vertical deviation - 1 um Lateral deviation - 2 um

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