Linear positioning stage DS30

piezoelectricminiaturevacuum-compatible

for high vacuum conditions up to 10^(-9) mbar especially flat housing (10mm height) Miniature translation stages with piezo electrical inertial drive. UHV edition of the DS 30. Technical data Width - 30 mm Height - 10 mm Depth - 30 mm Max. load Momentum (Mx) - 5 Ncm Momentum (My) - 5 Ncm Momentum (Mz) - 5 Ncm Blocking force (Fx) - 4.5 N Bearing force (Fy, Fz) - 30 N Guidance accuracy Yaw angle - 20 arc sec Pitch angle - 60 arc sec Vertical deviation - 1 um Lateral deviation - 2 um