Linear positioning stage DS40piezoelectricminiaturevacuum-compatible
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Characteristics
- Orientation
- linear
- Type
- piezoelectric
- Other characteristics
- miniature, vacuum-compatible
- Stroke
22 mm
(0.866 in)- Speed
1.2 mm/s
- Load
50 g
(1.76 oz)
Description
for high vacuum conditions up to 10^(-6) mbar
especially flat housing (11mm height)
Miniature translation stages with piezo electric inertial drive. Vacuum edition of the DS 40.
Technical data
Width - 40 mm
Height - 11 mm
Depth - 40 mm
Max. load
Momentum (Mx) - 5 Ncm
Momentum (My) - 5 Ncm
Momentum (Mz) - 5 Ncm
Blocking force (Fx) - 4.5 N
Bearing force (Fy, Fz) - 30 N
Guidance accuracy
Yaw angle - 20 arc sec
Pitch angle - 60 arc sec
Vertical deviation - 1 um
Lateral deviation - 2 um
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