Linear positioning stage MS30

motorizedpiezoelectricmulti-axis

for high vacuum conditions up to 10^(-6) mbar our all-rounder multi axes combinations without adapter plates Miniature translation stage with piezo electric inertial drive. Technical data Width - 30 mm Height - 12.5 mm Depth - 30 mm Velocity - 1.2 mm/s Max. load Momentum (Mx) - 5 Ncm Momentum (My) - 5 Ncm Momentum (Mz) - 5 Ncm Blocking force (Fx) - 4.5 N Bearing force (Fy, Fz) - 30 N Guidance accuracy Yaw angle - 120 arc sec Pitch angle - 60 arc sec Vertical deviation - 1 um Lateral deviation - 2 um