Linear positioning stage MS38 piezoelectricminiaturevacuum-compatible
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Characteristics
- Orientation
- linear
- Type
- piezoelectric
- Other characteristics
- miniature, vacuum-compatible
- Stroke
8 mm
(0.315 in)- Speed
1.5 mm/s
- Load
32 g
(1.13 oz)
Description
8 mm travel at 38 x 42 mm footprint
free aperture of 10 mm for ray passage
Miniature translastion stages with free opening dia 10mm and piezo electrical inertial drive. Vaccuum edition of MS 38.
echnical data
Width - 38 mm
Height - 9.5 mm
Depth - 40 mm
Max. load
Momentum (Mx) - 4 Ncm
Momentum (My) - 4 Ncm
Momentum (Mz) - 4 Ncm
Blocking force (Fx) - 4.5 N
Bearing force (Fy, Fz) - 20 N
Guidance accuracy
Yaw angle - 20 arc sec
Pitch angle - 60 arc sec
Vertical deviation - 1 um
Lateral deviation - 2 um
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