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Linear positioning stage MS15
motorizedpiezoelectric3-axis

linear positioning stage
linear positioning stage
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Characteristics

Orientation
linear
Type
motorized, piezoelectric
Number of axes
3-axis
Other characteristics
compact, miniature, vacuum-compatible
Stroke

3.5 mm (0.138 in)

Speed

1.5 mm/s

Description

for ultra-high vacuum conditions up to 10^(-9) mbar ultra compact design 3.5mm travel 15 x 15 mm footprint Ultra small miniature translation stages with piezo electic inertial drive. UHV edition of MS15.

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