Linear positioning stage MS15motorizedpiezoelectric3-axis
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Characteristics
- Orientation
- linear
- Type
- motorized, piezoelectric
- Number of axes
- 3-axis
- Other characteristics
- compact, miniature, vacuum-compatible
- Stroke
3.5 mm
(0.138 in)- Speed
1.5 mm/s
- Load
6 g
(0.21 oz)
Description
for ultra-high vacuum conditions up to 10^(-9) mbar
ultra compact design
15 x 15 mm footprint
Ultra small miniature translation stages with piezo electic inertial drive. UHV edition of MS15.
Technical data
Width - 15 mm
Height - 7 mm
Depth - 15 mm
Max. load
Momentum (Mx) - 4 Ncm
Momentum (My) - 4 Ncm
Momentum (Mz) - 4 Ncm
Blocking force (Fx) - 3 N
Bearing force (Fy, Fz) - 20 N
Guidance accuracy
Yaw angle - 20 arc sec
Pitch angle - 60 arc sec
Vertical deviation - 1 um
Lateral deviation - 2 um
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