Linear stage MS30

translationpiezoelectricmulti-axis

for closed loop operation (resolution up to 50nm) multi axes combinations without adapter plates Miniature translation stage with piezo electric inertial drive with measuring system. Technical data Width - 40 mm Height - 12.5 mm Depth - 30 mm Velocity - 1.2 mm/s Max. load Momentum (Mx) - 5 Ncm Momentum (My) - 5 Ncm Momentum (Mz) - 5 Ncm Blocking force (Fx) - 4.5 N Bearing force (Fy, Fz) - 30 N Guidance accuracy Yaw angle - 150 arc sec Pitch angle - 120 arc sec Vertical deviation - 2 um Lateral deviation - 2 um Measurement Information Reference Mark - middle Resolution - 1um to 50 nm Supply Voltage - 5 V Power Consumption - 150 mA