XY stage MS15translationpiezoelectric2-axis
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Characteristics
- Orientation
- XY, translation
- Type
- piezoelectric
- Number of axes
- 2-axis
- Other characteristics
- compact, vacuum-compatible, miniature
- Stroke
10 mm
(0.394 in)- Speed
1.5 mm/s
- Load
20 g
(0.71 oz)
Description
compact design for UHV applications
xy combination without adapter plate
Ultra small miniature translation stages with piezo electic inertial drive for UHV applications.
Technical data
Width - 22 mm
Height - 7 mm
Depth - 15 mm
Max. load
Momentum (Mx) - 4.5 Ncm
Momentum (My) - 1.5 Ncm
Momentum (Mz) - 3.2 Ncm
Blocking force (Fx) - 3 N
Bearing force (Fy, Fz) - 20 N
Guidance accuracy
Yaw angle - 20 arc sec
Pitch angle - 60 arc sec
Vertical deviation - 1 um
Lateral deviation - 2 um
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