XY positioning stage ML17XYZverticalpiezoelectric
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Characteristics
- Orientation
- XY, XYZ, vertical
- Type
- piezoelectric
- Number of axes
- 3-axis
- Other characteristics
- miniature, vacuum-compatible
- Stroke
5 mm
(0.197 in)- Speed
1 mm/s
- Load
25 g
(0.88 oz)
Description
- for ultra-low temperatures up to 4K
- for high vacuum conditions up to 10^(-9) mbar
Miniature translation stages for ultra low temperatures with piezo electric inertial drive. UHV edition of the ML 17.
Technical data
Width - 17 mm
Height - 8 mm
Depth - 32 mm
Max. load
Momentum (Mx) - 3 Ncm
Momentum (My) - 3 Ncm
Momentum (Mz) - 3 Ncm
Blocking force (Fx) - 1 N
Bearing force (Fy, Fz) - 1 N
Guidance accuracy
Yaw angle - 20 arc sec
Pitch angle - 60 arc sec
Vertical deviation - 2 um
Lateral deviation - 1 um
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