Linear positioning stage LA92

linear motor-driven1-axiscrossed roller

LA92 High Speed UHV Linear Axis Application: High resolution and fast scanning applications Benefit: Fast positioning in UHV, also vertically Features: Outstanding resolution, very slim, with internal motor • Vacuum: all areas HV / UHV up to 10E-11 mbar • Magnetism: magnetic | low-magnetic | magnet-free • Lubrication: liquid up to 10E-8 / dry up to 10E-11 mbar • Max. bakeout temperature: 120°C Options: • Material selection and vacuum lubrication adapted to the application • Can be combined to a XYZ transfer system (e.g. LA90, LA95, LA170) • Individual adaptation to the installation situation in the chamber • Optional with motion controller FMC400/450 Technical Data • Travel: 40 mm • Repeatability: ± 0.3 µm (unidirectional) ± 0.4 µm (bidirectional • Load: → 19 N / ↑ 9 N • Max. Speed: 200 mm/s • Motor: Nanomotion • Bearing: cross roller bearings stainless steel, hybrid, optional full ceramic • Feedback: Linear Scale • Feedback Resolution: 0.005 µm – 0.1 µm