Linear positioning stage MT105

piezoelectric1-axiscrossed roller

MT105 Application: multi purpose micro stage Benefit: for high resolution scanning Features: positioning with very high resolution • Vacuum: all pressure ranges HV /UHV down to 10E-11 mbar • Lubrication: liquid down to 10E-8mbar / dry lube down to 10E-11mbar • Magnetism: magnetic / low magnetic / magnet free • Max. bake-out temperature: 120°C Options: • Available as magnetic, low magnetic and magnetic-free version • With up to 2 different motors for motion of high loads • Combinable with the XYZ positioning system • Version for clean room ISO 14644-1 (up to class 1 on request) • Optional with controller FMC400/450 Technical Data: • Travel: 100 mm • Repeatability: - ± 0.4 µm (unidirectional) ± 0.5 µm (bidirectional) • Load: → 4 N / ↑ 55 N • Max. Speed: 100 mm/s • Motor: Piezo Motor • Bearing: cross roller bearings • Feedback: Linear Scale • Feedback Resolution: 0.005 µm – 1 µm