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  1. Power Transmission - Mechanical components
  2. Actuator and Positioning System
  3. Linear positioning stage
  4. Steinmeyer Holding GmbH

Linear positioning stage HDT255
electric1-axisprecision

Linear positioning stage - HDT255 - Steinmeyer Holding GmbH - electric / 1-axis / precision
Linear positioning stage - HDT255 - Steinmeyer Holding GmbH - electric / 1-axis / precision
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Characteristics

Orientation
linear
Type
electric
Number of axes
1-axis
Other characteristics
precision, aluminum, industrial, vacuum-compatible, for wafer handling, open-loop, crossed roller
Stroke

Max.: 16 mm
(0.63 in)

Min.: 1 mm
(0.039 in)

Speed

Max.: 16.6 mm/s

Min.: 1 mm/s

Repeatability

Max.: 5 µm

Min.: 0.7 µm

Load

Max.: 9.8 kg
(21.61 lb)

Min.: 0.5 kg
(1.1 lb)

Description

HDT255 High load aperture lifting table Application: vacuum lifting stage Benefit: - high stiffnes and load, aperture Features: wedge stage with aperture • Vacuum: all ranges HV / UHV / EUV up to 10E-11 mbar • Lubrication liquid up to 10E-8 / dry up to 10E-11 mbar • Magnetism: magnetic • Max. Bakeout temperature: 120°C Options: • With or without aperture • Different travels- • Optionally with and without measuring sys • Versions for clean room ISO 14644-1 (up to class 1 on request) • Material selection and vacuum lubrication adapted to the application • Individual adaptation to the installation situation in the chamber • Optionally with controller FMC400/450 Technical Data: • Travel: 16 mm • Repeatability: - ± 2.9 µm, ± 0.7 µm (unidirectional) ± 4 µm, ± 1 µm (bidirectional) • Load: 98 N • Max. Speed: 16.6 mm/s • Motor: Stepper Motor • Bearing: cross roller bearings stainless steel, hybrid • Feedback: Linear Scale • Feedback Resolution: 0.1 µm

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Other Steinmeyer Holding GmbH products

Cleanroom, Vacuum & Beam Positioning Stages: Linear Stages, Lifting Stages, XY Stages, Rotary Stages

*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.