Linear positioning stage HDT255

electric1-axiscrossed roller

HDT255 High load aperture lifting table Application: vacuum lifting stage Benefit: - high stiffnes and load, aperture Features: wedge stage with aperture • Vacuum: all ranges HV / UHV / EUV up to 10E-11 mbar • Lubrication liquid up to 10E-8 / dry up to 10E-11 mbar • Magnetism: magnetic • Max. Bakeout temperature: 120°C Options: • With or without aperture • Different travels- • Optionally with and without measuring sys • Versions for clean room ISO 14644-1 (up to class 1 on request) • Material selection and vacuum lubrication adapted to the application • Individual adaptation to the installation situation in the chamber • Optionally with controller FMC400/450 Technical Data: • Travel: 16 mm • Repeatability: - ± 2.9 µm, ± 0.7 µm (unidirectional) ± 4 µm, ± 1 µm (bidirectional) • Load: 98 N • Max. Speed: 16.6 mm/s • Motor: Stepper Motor • Bearing: cross roller bearings stainless steel, hybrid • Feedback: Linear Scale • Feedback Resolution: 0.1 µm