Linear positioning stage HT160

electric1-axiscrossed roller

HT160 Precise high load vertical lifting stage Application: vacuum lifting stage Benefit: high stiffnes and load Features: wedge with ball screw spindle • Vacuum: all ranges HV / UHV / EUV up to 10E-11 mbar • Lubrication liquid up to 10E-8 / dry up to 10E-11 mbar • Available as magnetic version • Max. Bakeout temperature: 120°C Options: • Material selection and vacuum lubrication adapted to the application • Individual adaptation to the installation situation in the chamber • Version for clean room ISO 14644-1 (up to class 1 on request) • Optional with controller FMC400/450 Technical Data: • Travel: 16 mm • Repeatability: - ± 1 µm, ± 1.7 µm (unidirectional) ± 1.7 µm, ± 2 µm (bidirectional) • Load: → 50 N / ↑ 45 N • Max. Speed: 2.2 mm/s • Motor: Stepper Motor • Bearing: cross roller bearings stainless steel, hybrid • Feedback: Open Loop, Linear Scale • Feedback Resolution: none or Linear