Linear positioning stage KDT300

electric2-axiscrossed roller

KDT300 Stable high load xy stage Application: transport stage , scanning stage for high loads Benefit: - high life time despite dry lube Features: lead life time despite dry lube • Vacuum: all ranges HV / UHV / EUV up to 10E-11 • Lubrication liquid up to 10E-11 • Aperture: 80 x 80 mm • Max. Bakeout temperature:120°C Options: • With and without measuring system • Optionally with controller FMC400/450 • Travels up to 80 mm for loads up to 10 kg • Optionally with lead screw drive or lubricated ball screw drive for higher speeds • Can be combined with rotary tables (e.g. DT155) for rotary applications • Material selection and vacuum lubrication adapted to the application • Individual adaptation to the installation situation in the chamber • Design for clean room ISO 14644-1 (up to class 1 on request) Technical Data: • Travel: 10 mm, 50 mm, 10 mm • Repeatability: • ± 2.8 µm, ± 0.7 µm, ± 0.4 µm, ± 2.8 µm (unidirectional) ± 0.5 µm, ± 4 µm (bidirectional • Load: → 44 N / ↑ 120 N • Max. Speed: 10 mm/s • Motor: Stepper Motor • Bearing:Cross roller stainless steel, hybrid • Feedback: Open Loop, Linear scale • Feedback Resolution: 0.1 µm