Linear positioning stage LA95electric1-axisprecision
Add to favorites
Compare this product
Characteristics
- Orientation
- linear
- Type
- electric
- Number of axes
- 1-axis
- Other characteristics
- precision, aluminum, vacuum-compatible, for wafer handling, open-loop, crossed roller
- Stroke
Min.: 1 mm
(0.039 in)Max.: 185 mm
(7.283 in)- Speed
Min.: 1 mm/s
Max.: 8.4 mm/s
- Repeatability
Min.: 0.4 µm
Max.: 5 µm
- Load
Min.: 0.1 kg
(0.22 lb)Max.: 4.5 kg
(9.92 lb)
Description
LA95
- Application: transport stage, scanning stage
- Benefit: high life time despite dry lube
- Features: lead screw with dry lube or
ball screw with liquid lube
• Vacuum: all pressure ranges HV / UHV down to 10E-9 mbar
• Magnetism: magnetic
• Lubrication: liquid down to 10E-8 / dry lube down to 10E-11 mbar
• Max. bake-out temperature: 120°C
Technical Data
• Travel: 40mm, 80mm, 185mm
• Repeatability:
± 1,9 µm, ± 0,4 µm (unidirectional)
± 2.9 µm, ± 0.5 µm (bidirectional)
• Load: → 45 N / ↑ 40 N
• Max. Speed: 8.4 mm/s
• Motor: Stepper Motor
• Bearing: cross roller bearings stainless steel, hybrid , optionally ceramic
• Feedback: Linear Scale, Open Loop
• Feedback Resolution: 0.001 µm – 0.1 µm
Catalogs
No catalogs are available for this product.
See all of Steinmeyer Holding GmbH‘s catalogsOther Steinmeyer Holding GmbH products
Cleanroom, Vacuum & Beam Positioning Stages: Linear Stages, Lifting Stages, XY Stages, Rotary Stages
*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.