Linear positioning stage KT105

piezoelectric2-axiscrossed roller

KT105-50 High resolution XY stage Application: vacuum-XY-stage Benefit: fast and high resolution Features : parameters for yaw and pitch three times better than the variant with apertur • Vacuum: all areas HV / UHV up to 10-11 mbar • Magnetism: magnetic | low-magnetic | magnet-free • Lubrication: liquid up to 10-8 / dry up to 10-11 mbar • Max. bakeout temperature: 120°C Options: • With and without aperture • Available as magnetic, low-magnetic and magnet-free versions • Different motor variants: Nanomotion or piezo motor • Combinable with XYZ positioning system (e.g. MT105) • Combinable with rotary stages (e.g. DT105) for rotary applications • Optional with controller FMC400/450 Technical Data • Travel: 50 mm • Repeatability: - ± 0.3 µm, ± 0.5 µm (unidirectional) ± 0.4 µm, ± 0.7 µm (bidirectional • Load: → 5 N, 4N / ↑ 45 N • Max. Speed: 10/50 mm/s • Motor: Piezo Motor / Nanomotion • Bearing: cross roller bearings stainless steel, hybrid, optional full ceramic • Feedback: Linear Scale • Feedback Resolution: 0.001 µm – 0.1 µm