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Piezoresistive vacuum sensor
901P MKS Instruments

  • piezoresistive vacuum sensor 901P MKS Instruments
Designed specifically for load lock environments, the 901 Plus (901P) Loadlock Transducer (LLT) combines Piezo and MicroPirani™ vacuum sensor technology. The combined output provides significantly higher accuracy, stability, repeatability and a faster response time than conventional thermal conductivity gauges.
Features & Benefits:

3-sensor functionality in a single transducer for a wide measurement range
Ultra compact design saves space
Setup, diagnostic and operation software available
Optional analog output and electrical connectors match other vendors' gauges for easy upgrades
Three optional setpoints
Optional local display

More specifications



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