piezoresistive vacuum sensor
901P MKS Instruments

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piezoresistive vacuum sensor piezoresistive vacuum sensor - 901P


  • Technology:



The first aspect you will notice about this item is the design, which was created specifically for load lock environments. The 901 plus is a device that combines Piezo an MicroPirani technologies, which are advanced additions when it comes to vacuum sensors. Next, the output is a combined one and provides higher stability, accuracy and repeatability, along with a response time that is faster than in the case of conventional thermal conductivity gauges.

In terms of the features and benefits, the 3-sensor functionality of the single transducer and the ultra compact design that can save you space and time are just two of the important additions. You can use the software available for diagnostic, operation and setup, and the package also includes three optional setpoints and an optional local display.