Auger electron spectrometer (AES)
OMICRON
* highest spatial resolution
* smallest e-beam spot size
* unique low-energy performance
* efficient SEM with in-lens SED
NanoSAM Electron Analyser:
* variable energy resolution
* excellent sensitivity, multichannel detection
Sample Handling:
* flexible sample size
* variable sample temperature (50-500K)
* sample tilt ±60°
The NanoSAM Lab is the ultimate tool for the analysis of small structures. Driven by the unique performance of the UHV Gemini electron column, it guarantees unrivalled resolution below 5 nm in Scanning Auger Microscopy (SAM) and better than 3 nm in SEM.
In contrast to other Auger tools, the extremely good resolution is not only available at standard 20 keV beam energy, but even at 5 keV the SAM resolution remains below 10 nm. This allows operation in a parameter range where the Auger cross sections are high, and well documented for quantitative analysis.
