Ion source FDG15

Specification Energy range 400 eV to 5 keV (10 eV optional) Max. beam current > 10 μA @ 5 keV > 100 nA @ 15 eV (10 eV option) Beam diameter between 300 μm and 2′′ @ 5 keV Integral Port Aligner Yes Cathode Yttrium oxide coated Tungsten (optional) Iridium filament Working distance 30 mm - 300 mm Insertion depth 173 mm Chamber pressure during operation 5x10-7 mbar - 1x10-8mbar Mounting flange CF 35 / 2¾′′ OD Electronics Interface TCP/IP Software control LabVIEW™- based Software "ProIon" The FDG 15 uses the same proven beam generation as the FDG 150 and can be used as a substitute for all applications where e.g. the wide spread but no longer available ISE 10 (Leybold/Kremer/OMICRON) has been used in the past. In addition the FDG 15 comes with a more flexible ion optics to adjust for longer working distances and an optional ion flux stabilization.