Optical profilometer UA3P series

3Datomic forcestylus

The Panasonic UA3P profilometer series is designed to measure aspherical lenses & molds, semiconductor wafers, and any other precision component requiring nanometer level accuracy ranging up to 200mm x 200mm. Different machine models are available to meet your optical & high aspect ratio metrology needs. The UA3P-300, UA3P-4 and UA3P-5 all offer users the accuracy of AFM technology with the measurement range of a CMM. Our unique approach uses atomic force probe technology in the stylus and HeNe laser-based interferometric XYZ axis positioning. Couple this technology with a solid granite-base and you have a robust metrology system that can be used on the factory floor and still deliver 0.1um level total uncertainty. • The UA3P can measure aspherical lenses and free-form mirrors and their molds, which are essential for digital consumer electronics such as mobile phones, DSCs, DVDs, and Blu-ray recorders, as well as in home security, optical communications, and vehicle H • Ultra-accurate measurement in only 3 minutes • Automatic NC program generation • Extensive library of optional software • Easy operation supports rapid feedback to machining Outer Dimensions (W x D x H) mm 700 x 780 x 1,500 Mass of Main Body 700 kg (Others: 150 kg) Measuring Range (X, Y, Z axes) mm 30x30x20 Measured Object Placement Area (X, Y, Z axes) mm 100x100x100 Measuring Probe AFP Resolution 0.3nm Max. Inclination Angle for Top-Surface Measurement 75º Measurement Accuracy with Top-Surface Probe 30° max.: ±0.05 µm (round trip) 45° max.: ±0.08 µm (round trip) 60° max.: ±0.15 µm (round trip) 70° max.: ±0.15 µm (back) *When using the standard ruby stylus or ceramic stylus