Piezoelectric linear motor
Piezo LEGS Linear LTC300
PiezoMotor
- 300N Piezo LEGS® linear motor
- Easy Integration
- High Resolution
- High Speed Dynamics
- very simple electronics
The Piezo LEGS® 300N motor is intended fohigh force and precision applications. Thincludes applications in vacuum for the semiconductor industry.
The advantage of using the Piezo LEGS® technology is the unsurpassed accuracy in positioning resolution as well as automatic locking giving true set-and-forget performanceThe technology is based on direct drive which removes the issues of hysteresis and backlash.
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