Motorized nanopositioning stages

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nanopositioning stage with parallel kinematics
nanopositioning stage with parallel kinematics
P-616 NanoCube®

Stroke : 100 µm
Load: 21 g

... Parallel-kinematic design for the highest stiffness in all spatial directions Highly dynamic motion due to high resonant frequencies even with loads up to 100 g Innovative product design for flexible use due to single mounting platform. Only nanopositioner ...

linear nanopositioning stage
linear nanopositioning stage
NPX series

Stroke : 0.4, 0.2, 0.1 mm

... low as 0.2 nm, the NPX Piezo Stack linear stage make ultra-fine adjustments with resolution only limited by the noise of the control electronics. Large Piezoelectric Travel Range NPX Piezo Stack linear stages feature ...

XY nanopositioning stage
XY nanopositioning stage
PXY Series

Stroke : max 16.0 µm

... The PXY Series by Piezosystem Jena is an XY nanopositioning stage which is used to compromised piezo electric actuators into a flexure hinges systems. With these assembly, it enables the unit to work under a dynamic conditions ...

Z-axis nanopositioning stage
Z-axis nanopositioning stage
Model ZSA-1000C

Stroke : 1 mm

... DSM’s nanopositioning piezoelectric ZSA-1000C stage features flexure-guided motion over a 1mm vertical travel range for scanning, metrology, and inspection processes. The stable and stiff kinematic design promotes parallelism ...

vacuum-compatible nanopositioning stage
vacuum-compatible nanopositioning stage
LA97 series

Stroke : 100, 200, 300 mm
Speed: 5 mm/s
Repeatability: 0.015 µm - 0.02 µm

... LA97 - Vacuum linear stages and axes Nanometer linear stage HV / UHV up to 10E-11, 100 - 300 mm travel, 0.02 µm repeatability, up to 10 kg load • Vacuum: all areas HV / UHV up to 10E-11 mbar • Lubrication: liquid ...

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Steinmeyer Mechatronik GmbH
XY nanopositioning stage
XY nanopositioning stage
KLT300 series

Stroke : 10 mm
Speed: 5 mm/s

... : 80 x 80 mm Optionally configurable: • With and without measuring system • Optionally with lead screw drive or lubricated ball screw drive for higher speeds • Can be combined with rotary tables (e.g. DT155) for ...

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Steinmeyer Mechatronik GmbH
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