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... established in 2011. As a National High Tech Enterprise, 82 intellectual property rights have been authorized, involving 6 invention patents, utility models, appearance patents and 76 software copyrights. Multi-axis ...
Repeatability: 0.03 mm
Load: 25 kg
Stroke: 50 mm - 1,000 mm
... established in 2011. As a National High Tech Enterprise, 82 intellectual property rights have been authorized, involving 6 invention patents, utility models, appearance patents and 76 software copyrights. Multi-axis ...
Repeatability: 1, 0.8 µm
Load: 5 kg
Stroke: 5, 15 mm
MP410-3 High Vacuum Aligner up to 10E-6 mbar Customizable: • Ideal for transfer measurements in vacuum up to 10-6 mbar • Designed for large samples with an aperture ...
Repeatability: 50 nm
Stroke: 11, 20 mm
The SMARPOD CLS-32 is a mid-size system and is equipped with Exchangeable Drive Units, thus perfectly suited for high availability applications. The SMARPOD CLS-32 key feature is the Exchangeable Drive ...
Fast 3-axis UHV system LA80-LA90 UV / UHV / EUV, max. 500 mm travel, 2 µm repeatability, 5 kg load This fast transfer stage is suitable for precise, fast and long-life ...
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