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- Ultra-high vacuum positioning system
Ultra-high vacuum positioning systems
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... established in 2011. As a National High Tech Enterprise, 82 intellectual property rights have been authorized, involving 6 invention patents, utility models, appearance patents and 76 software copyrights. Multi-axis Positioning ...
Repeatability: 0.03 mm
Load: 25 kg
Stroke: 50 mm - 1,000 mm
... established in 2011. As a National High Tech Enterprise, 82 intellectual property rights have been authorized, involving 6 invention patents, utility models, appearance patents and 76 software copyrights. Multi-axis Positioning ...
Repeatability: 50 nm
Stroke: 11, 20 mm
... CLS-32 is a mid-size system and is equipped with Exchangeable Drive Units, thus perfectly suited for high availability applications. The SMARPOD CLS-32 key feature is the Exchangeable Drive Units (EDUs) guaranteeing ...
Repeatability: 0.5 µm
Load: 0 g - 5,000 g
Stroke: 10 mm
... MAUKA is a compact hexapod designed to position up to 5 kg payloads with a submicrometer resolution. MAUKA hexapod offers travel ranges of 10 mm in X and Y, 20 mm in Z, and 16° in the three rotations. Its diameter is 107 mm and it ...
SYMETRIE
Repeatability: 0.08 µm
Load: 1,000,000 g
... motorization, calibration and software to offer you solutions tailored to your specific projects requiring knowledge of precision positioning, metrology and dynamics. Based on your specifications, our design office ...
SYMETRIE
... Fast 3-axis UHV system LA80-LA90 UV / UHV / EUV, max. 500 mm travel, 2 µm repeatability, 5 kg load This fast transfer stage is suitable for precise, ...
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