RF plasma generator Apex RF

The versatile Apex® family of RF generators and power-delivery systems showcases a compact, modular design suitable for chamber mounting. Utilizing sophisticated RF-conversion technology, Apex RF generators and power-delivery systems offer enhanced product and process reliability. High-density power capabilities make them ideal for advanced plasma processes. And various communications models and configurable features allow you to customize your platform and explore integration approaches. No custom generator lead times are necessary. Features High power density in a streamlined design  On-board chamber mount, on-tool frame mount, rack mount, and shoebox options  Wideband control loops Optional pulse control High-speed arc management Benefits Readily integrate process tools with enhanced flexibility Stabilize plasma operation Improve yield for fast arc management Easily customize and configure to your process requirements