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... Overview
The air-cooled
RF
generator TruPlasma
RF 1001 Air delivers up to 1000 W of precisely dosed, reproducible
RF power with 0.1 W resolution (100 mW steps). Designed for ...
TRUMPF lasers
programmable plasma generatorTruPlasma MW Series 1000 /3000 / 5000
... Overview
Robust solid-state microwave
plasma
generator delivering very high
plasma densities for demanding industrial processes. The TruPlasma MW Series is based on solid-state technology, providing ...
TRUMPF lasers
PC-controllable plasma generatorTruPlasma RF Sériés 1000/3000 (G2/13)
... Applications TruPlasma RF Series 1000 / 3000 (G2/13) generators are designed for plasma processes such as reactive-ion etching (RIE), atomic layer deposition (ALD), plasma-enhanced ...
TRUMPF lasers
... description
RF technology without compromises
Overview
With these
RF
generators the TruPlasma
RF Series 3000 stands out for its robust design and high efficiency. ...
TRUMPF lasers
... The air-cooled RF generator TruPlasma RF 1001 Air delivers up to 1000 watts of high-precision, reproducible RF energy with an extremely fine resolution – in increments of 100 mW – and ...
TRUMPF Power electronics
... The decisive factor in coating or structuring surfaces is a stable and reproducible plasma current supply. RF generators of the TruPlasma RF Series 1000 / 3000 (G2/13) offer the best ...
TRUMPF Power electronics
... output power to be scaled to up to 80 kW. These compact VHF generators are also very cost-effective and have a robust design. Precise and fast arbitrary pulse shapes This provides the best plasma process control for ...
TRUMPF Power electronics
... With these RF generators you can rest assured the TruPlasma RF Series 3000 stands out for its robust design and high efficiency. This means it is best suited for stable reproducible plasma ...
TRUMPF Power electronics
... complement to RF generators from TRUMPF Hüttinger. Their intelligent matching algorithm and digital control platform for process monitoring provide a comprehensive solution in which all of the components work together ...
TRUMPF Power electronics
... As the semiconductor industry speeds toward a new inflection, the eVerest® RF generator fills the need for transformational plasma control. Its configurable multi-level pulsing enables instantaneous or ...
ADVANCED ENERGY
... The versatile Apex® family of RF generators and power-delivery systems showcases a compact, modular design suitable for chamber mounting. Utilizing sophisticated RF-conversion technology, Apex RF ...
ADVANCED ENERGY
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