Programmable plasma generator TruPlasma MW Series 1000 /3000 / 5000

high-frequencyRFPC-controllable

Overview
Robust solid-state microwave plasma generator delivering very high plasma densities for demanding industrial processes. The TruPlasma MW Series is based on solid-state technology, providing superior frequency accuracy versus magnetron-based systems. Its modular platform enables precise scaling of output power while maintaining stable power delivery and consistent process quality.

Key features

• Solid-state microwave technology with high frequency accuracy
• Modular platform concept for precise, scalable output power
• Smart auto frequency tuning for automatic optimal frequency adaptation and high reproducibility
• Synchronous phasing: multiple generators can be phase-synchronous and pulsed in multi-antenna systems to improve plasma homogeneity
• Robust design ensuring reliable operation even in case of mismatch
• High-precision digital frequency modulation for reproducible process control
• Real-time communication via digital EtherCAT interface for millisecond control and precise plasma distribution

Applications

• Photovoltaic cell production: sputtering, PECVD and other coating/ablation processes
• Semiconductor manufacturing: dry etching and advanced plasma processes
• Flat-panel and display coating: PECVD, ALD, RIE and related processes

Advantages for processes

• Maximum achievable plasma densities for high-demand applications
• Precise energy dosing and tight power regulation for excellent wafer-to-wafer repeatability
• Stable power supply that preserves process quality under varying conditions
• Improved plasma homogeneity by adjusting phase coherence between generators

Technical characteristics / specifications

• Product family: TruPlasma MW Series 1000 / 3000 / 5000
• Example model on this page: TruPlasma MW 3002
• Technology: solid-state microwave plasma generator
• Frequency control: high-precision digital frequency modulation
• Auto frequency tuning: automatic adaptation for optimal process results
• Multi-generator operation: synchronous phasing for multi-antenna systems
• Interface: digital EtherCAT for real-time communication and millisecond control
• Design: modular platform enabling scalable output power and high reliability
• Target industries: semiconductor manufacturing, photovoltaics, display coating