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... technology and CombineLine output matching for stable
plasma processes.
Key features
- Smart Auto Frequency Tuning (AFT): fast, optimal frequency matching between generator and matchbox.
- High‑precision
TRUMPF lasers
... ) are bipolar pulse generators designed for plasma-assisted coating processes such as PVD, PECVD and reactive sputtering. They provide configurable, formable output waveforms and fully digital arc management ...
TRUMPF lasers
programmable plasma generatorTruPlasma MW Series 1000 /3000 / 5000
... Overview
Robust solid-state microwave
plasma
generator delivering very high
plasma densities for demanding industrial processes. The TruPlasma MW Series is based on solid-state technology, providing ...
TRUMPF lasers
PC-controllable plasma generatorTruPlasma RF Sériés 1000/3000 (G2/13)
... Applications TruPlasma RF Series 1000 / 3000 (G2/13) generators are designed for plasma processes such as reactive-ion etching (RIE), atomic layer deposition (ALD), plasma-enhanced chemical vapor ...
TRUMPF lasers
... br>
Applications
- Etching and coating processes: plasma etching, reactive ion etching (RIE), atomic layer deposition (ALD), plasma-enhanced chemical vapor deposition (PECVD).
- Coating
TRUMPF lasers
... heavy or difficult-to-evaporate materials. Supporting both pulsed and bias operation, it delivers stable
plasma performance for critical PVD and
PECVD processes while minimising arc-related downtime and substrate damage.
Tagline
Pulsed ...
TRUMPF lasers