Industrial plasma generator TruPlasma RF Air Sériés 1000

for surface coatingPC-controllableprogrammable

Overview
The air-cooled RF generator TruPlasma RF 1001 Air delivers up to 1000 W of precisely dosed, reproducible RF power with 0.1 W resolution (100 mW steps). Designed for semiconductor, solar-cell and display production, it integrates patented TRUMPF Hüttinger technology and CombineLine output matching for stable plasma processes.

Key features

• Smart Auto Frequency Tuning (AFT): fast, optimal frequency matching between generator and matchbox.
• High‑precision arc management: early arc detection and protection for sensitive processes and equipment.
• Multi‑level pulsing: configurable multi‑stage pulse shapes for advanced process control.
• Plug & Play modularity: ½‑19‑inch plug‑in form factor for easy replacement and retrofit.
• True 50 Ω output (CombineLine): consistent process power and reduced sensitivity to load variations.
• Uniform generator family: same technology across power classes for simplified integration and spare‑part strategy.
• Independence from RF cable length: no cable‑length adaptation required after system changes.

Applications

• Reactive‑ion etching (RIE)
• Atomic layer deposition (ALD)
• Plasma‑enhanced chemical vapor deposition (PECVD)
• RF sputtering
• Production of semiconductors, MEMS, flat‑panel displays and solar cells

Customer benefits & system functions

• High repeatability: energy dosing in 100 mW increments for wafer‑to‑wafer consistency.
• Compact, space‑saving design: ½‑19‑inch plug‑in unit suitable for new systems and retrofits.
• Broad interface set for integration: configurable analogue I/O, Ethernet, DeviceNet, PROFIBUS, EtherCAT.
• TRUMPF SystemPort support: closed‑loop control, real‑time RF measurement at matchbox in/out, matchbox protection and process monitoring.
• Digital process functions: AFT 2.0, arc management, multi‑level pulsing for fine adaptation to process requirements.

Technical specifications

• Power class: up to 1000 W (TruPlasma RF 1001 Air)
• Power resolution: 0.1 W (100 mW steps)
• Cooling: air‑cooled
• Output impedance: true 50 Ω (CombineLine technology)
• Pulsing: multi‑level, freely selectable pulse shapes
• Auto frequency tuning: Smart AFT for fast generator–matchbox tuning
• Form factor: compact ½‑19‑inch plug‑in unit
• Interfaces: configurable analogue I/O, Ethernet, DeviceNet, PROFIBUS, EtherCAT
• System control: TRUMPF SystemPort for closed‑loop control and real‑time measurement