Programmable plasma generator TruPlasma DC Series 3000 (G2)

industrialPC-controllablefor surface coating

Overview
The TruPlasma DC Series 3000 (G2) is a compact water-cooled DC generator for DC sputtering processes, including replacement of pulsed process power supplies. Progressive arc management ensures excellent layer quality and higher production yield. The very compact, 19-inch plug-in design enables straightforward integration into existing systems.

Key features

• Lowest arc energy in its class: Residual energies of < 0.3 mJ/kW ensure excellent coating quality and high deposition rates.
• High power density: Very compact 19-inch plug-in unit for simple integration at high power levels.
• Wide power range: Output power from 20 kW to 300 kW, enabling replacement of larger generators.
• Complete water cooling: Full water cooling allows long runtimes and reduces maintenance.
• Simple system integration: Variable line voltage (400 V to 480 V) and multiple data interfaces (EtherCAT, EtherNET/IP).

Applications

• Hard material coating: DC magnetron sputtering for functional coatings that improve surface hardness, friction and thermal/chemical stability.
• Metallization: PVD deposition of ultra-thin metal layers with homogeneous, defect-free results.
• Photovoltaic cell production: Suitable for TCO and other conductive coatings thanks to very low residual arc energy.
• Architectural glass: Large-area coatings with high process power requirements.

Customer benefits

• Cost-effective alternative to pulsed DC generators with improved production yield through advanced arc management.
• Compact solution for higher outputs: small footprint while achieving high coating quality and productivity above 60 kW.
• Water cooling increases runtime, reduces maintenance and avoids dust contamination compared to air-cooled units.

Options

• Water valve control: Regulates cooling water flow to prevent condensation and overheating.
• Interfaces: EtherCAT and EtherNET/IP for easy system integration.
• Parallel operation and synchronization: Multiple TruPlasma DC Series 3000 (G2) units can run synchronized; up to 5 TruPlasma DC 3030 units can be paralleled to act as a TruPlasma DC 3150.

Software

• PVD Power: Multilingual user software for operation, configuration and diagnosis: real-time process values, warnings/alarms, operator-setpoints, and high-resolution recording/visualization (oscilloscope function).

Downloads

• Product brochure available (TruPlasma DC Series 3000 (G2) brochure).

Technical specifications

• Residual arc energy: < 0.3 mJ/kW
• Output power range: 20 kW to 300 kW
• Cooling: complete water cooling
• Form factor: compact 19-inch plug-in unit
• Line voltage: variable 400 V to 480 V
• Data interfaces: EtherCAT, EtherNET/IP (options)
• Parallel operation: up to 5 TruPlasma DC 3030 in parallel (acts as TruPlasma DC 3150)
• Suitable processes: DC sputtering, replacement for pulsed DC in many sputtering processes
• Software: PVD Power