Floor power supply TruPlasma MF Series 7000 (G2)

AC/ACfor industrial applicationshigh-power

Overview
The TruPlasma MF Series 7000 (G2) provides complete control over MF sputtering processes with superior arc management and ignition behavior. It is designed as a power supply for large-area coating and demanding reactive processes such as dual magnetron sputtering. The generators achieve peak efficiencies of more than 90% and operating efficiencies above 80%, together with efficient cooling water management to reduce operating costs.

Key benefits

• Highest coating quality and productivity: excellent results and high coating rates even for demanding reactive processes.
• Maximum efficiency: peak efficiencies > 90%; operating efficiencies > 80%.
• Stable power supply in all ambient conditions: reliable even with high cooling water temperatures and low differential pressures.
• Worldwide usability: wide operating voltage range allows use without technical adjustments.

Applications

• Large-area coating (e.g., architectural glazing) where stability and homogeneity are critical.
• Coating of flat screens and touch panels using dual magnetron sputtering to apply ultra-thin, high-strength AlxOx layers.
• Photovoltaic cell production and coating of solar glass with transparent conductive coatings (TCO) using MF sputtering.

Customer benefits / Process control

• Precise process control with a few parameter settings to balance ARC sensitivity and throughput.
• Superior ARC management with high reaction speeds, reduced residual energy, and prevention of arc-related target damage; supports voltage-controlled transition mode.
• Various interfaces and the TruControl Power operating software enable convenient configuration and diagnostics.

Options

• Active electrical cabinet dehumidification for very high humidity environments (requires cooling water control).
• Electrical cabinet door with a particularly wide opening (180° option; 130° standard).
• Interfaces: Profinet, Profibus, EtherCAT, analog and digital I/Os for integration.
• Ultra-fast ARC management (UltraFastTreatment ≤ 1 mJ/kW as an option; standard ≤ 10 mJ/kW). Safety category 3 required for UltraFastTreatment.
• Auxiliary ignition to reduce arc formation and thermal stress; ignition voltage and ramp time adjustable.
• Extended frequency range option: 20–70 kHz for MF generators up to 100 kW (standard 20–50 kHz).

Software
TruControl Power: user-friendly, multilingual software for operation, configuration, and diagnostics of the generator.

System components and accessories

• Optimized TRUMPF Hüttinger MF power cables supplied to guarantee optimal system performance.
• Selection of suitable system components to adapt the TruPlasma MF Series 7000 (G2) to the system environment.

Downloads
Product brochure available in PDF format.

Technical specifications

• Denomination: TruPlasma MF Series 7000 (G2)
• Brand: TRUMPF
• Peak efficiency: > 90%
• Typical operating efficiency: > 80%
• Power range: MF generators available up to 100 kW (variants and options)
• Standard frequency range: 20–50 kHz; optional extended range: 20–70 kHz (up to 100 kW)
• UltraFastTreatment (optional): ≤ 1 mJ/kW; standard ARC treatment: ≤ 10 mJ/kW
• Safety requirement for UltraFastTreatment: Safety category 3
• Auxiliary ignition: adjustable ignition voltage and ramp time
• Electrical cabinet door: standard 130° opening; optional 180° opening
• Cooling: efficient cooling water management; reliable operation at high cooling water temperatures and low differential pressures
• Interfaces: Profinet, Profibus, EtherCAT, analog and digital I/Os
• Software: TruControl Power (multilingual) for operation, configuration and diagnostics
• Typical applications: dual magnetron sputtering, large-area coating, reactive processes, thin-film coatings for displays and photovoltaics