Proportional flow regulator MC

differential pressuremassfor gas

Overview
Fast mass flow controllers that use laminar differential pressure (DP) measurement technology for automated measurement and control of gases. Designed for industrial processes and research applications with wide full-scale flow and pressure options, multiple series variants for different applications, and numerous communication and build options.

Key features

• Laminar DP (differential pressure) mass flow measurement technology
• Measures mass flow, volumetric flow, temperature, and pressure
• 98–130 pre-loaded gas calibrations (varies by series)
• Ultra-fast control response time as low as 30 ms
• Measurement and control range as high as 0.01% – 100% (10,000:1 turndown) for some variants
• Operating pressure ranges from low vacuum to high pressure options depending on series
• Limited lifetime warranty

Performance highlights

• Full scale flow ranges: 0.5 SCCM – 12,000 SLPM (series- and model-dependent)
• Operating pressure range (examples): 11.5 – 160 PSIA (typical MC series), up to 320 PSIA for high-pressure variants
• Accuracy examples: as good as ±0.5% of reading or ±0.1% of full scale (whichever is greater) for standard MC; corrosion-resistant variants can achieve ±0.4% of reading and ±0.2% of full scale
• Control response: as fast as 30 ms (some high-pressure variants 100 ms)

Available series and purpose

• MC Series — flagship general-purpose laminar DP mass flow controllers; fast proportional control; wide flow options (0.5 SCCM – 12,000 SLPM)
• MCS Series — corrosion-resistant controllers with reduced wetted materials; up to ~130 corrosive and non-corrosive gas calibrations preloaded; accuracy examples ±0.4% reading / ±0.2% full scale
• MCQ Series — high-pressure controllers for higher-pressure processes; operating to higher PSIA ratings and appropriate accuracy tradeoffs
• BIOC Series — controllers designed for bioreactors and fermenters; ASME BPE compliant, long-term stability, compliant materials (including USP Class VI elastomers) and designed for scalability (10,000:1 operating range)
• MCD Series — bi-directional mass flow controllers with two valves to control flow in two directions
• MCT Series — devices that switch between two gas sources (two sources, one device)
• MCW / MCWD — low pressure drop laminar DP MFCs
• SFF / MCV — options for vacuum pressures and SEMI footprint
• IS‑Max — intrinsically safe MFCs for explosive atmospheres (intrinsically safe series)

Build options and selections
Communication Protocols: RS-232 Serial (default); RS-485 Serial; Analog (4–20 mA, 0–10 Vdc, 0–5 Vdc, or 1–5 Vdc); Modbus RTU (over RS-232 or RS-485); Modbus TCP/IP; DeviceNet; EtherCAT; EtherNet/IP; PROFIBUS; PROFINET; IO-Link
Displays: Backlit monochrome (default) or TFT color; integrated or panel-mount; none
Process Connections: 10-32, NPT, SAE, BSPP, VCRM, VCO, Compression fittings (selection varies by model)
Ingress Protection: IP40 (default); optional IP66, IP67
Hazardous Environment Ratings: Options for CSA Class 1 Div 2 and ATEX Class 1 Zone 2 builds (series/option dependent)
Humid Gases: Relative humidity compensation available
Measurement Technology: Laminar differential pressure (laminar DP) flow sensing with temperature and pressure correction

Spec sheet families / model groups

• MC family spec ranges (low / mid / high full-scale groups cover 0.5–12,000 SLPM depending on range)
• MCS family spec sheets cover corrosion-resistant options and their ranges
• MCQ family spec sheets cover higher-pressure controller options
• BIOC family spec sheets cover bioreactor / fermenter-specific ranges and compliance

Additional notes
Many MC-series instruments are available with options for hazardous-area builds, different display and connector options, and a wide range of communication protocols and fittings. Instruments are made-to-order with selectable calibration and accuracy options.

Technical specifications

• Measurement method: Laminar differential pressure (laminar DP) with temperature and pressure correction
• Measured variables: Mass flow, volumetric flow, temperature, pressure
• Full scale flow ranges: 0.5 SCCM – 12,000 SLPM (model-dependent)
• Flow meter/controller ranges listed on product pages: examples include 0.5 SCCM, 1 SCCM, 2 SCCM, 5 SCCM, 10 SCCM, 20 SCCM, 50 SCCM, 100 SCCM, 200 SCCM, 500 SCCM, 1 SLPM, 2 SLPM, 5 SLPM, 10 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 250 SLPM, 500 SLPM, 1,000 SLPM, etc.
• Operating pressure: typical MC 11.5 – 160 PSIA; MCQ up to 320 PSIA (variant-dependent)
• Accuracy examples: down to ±0.4%–±0.6% of reading or ±0.1%–0.2% of full scale depending on series and calibration
• Control range / turndown: up to 10,000:1 for some MC/BIOC variants; others 200:1 or 1–100% depending on series
• Control response: as fast as 30 ms (typical high-speed response); some high-pressure variants ~100 ms
• Preloaded gas calibrations: typically dozens to over a hundred (e.g., 98–130 gas calibrations depending on series)
• Displays: Backlit monochrome or TFT color, integrated or panel-mount options, or no display
• Communications: Analog, RS-232, RS-485, Modbus RTU, Modbus TCP/IP, DeviceNet, EtherCAT, EtherNet/IP, PROFIBUS, PROFINET, IO-Link
• Process connections: 10-32, NPT, SAE, BSPP, VCRM, VCO, Compression (model-dependent)
• Ingress protection options: IP40 default; IP66 / IP67 optional
• Hazardous area build option: -X build for CSA Class 1 Division 2 / ATEX Zone 2; intrinsically safe IS-Max series available for more hazardous zones