Tabletop power supply

DCmultiple-output

Product overview
Provides DC power for electrochemical polishing of 300 mm wafers in semiconductor manufacturing. OEM 6-channel DC source in a single package containing six 600W power supplies. Self-contained controller operates independently once pre-configured.

Key features

• OEM 6 channel DC source
• Single-package assembly of six 600W power supplies
• Self-contained controller—operates independently once pre-set
• Supports ramps and sequences
• Inter-channel dependent operation capability
• DeviceNet interface
• Solid-state polarity switching

Technical specifications

• Channels: 6
• Power per channel: 600W
• Configuration: Single package 6-pack of power supplies
• Control: Built-in controller with programmable sequences and ramps
• Communication: DeviceNet
• Polarity switching: Solid-state

Applications

• Electrochemical polishing (electropolishing) of 300 mm wafers
• Thin-film processing and surface finishing
• Semiconductor R&D and production lines

Interfaces and control

• DeviceNet communication for integration with factory automation
• Programmable ramps, sequences and inter-channel dependency for complex processes
• Solid-state polarity switching for fast and reliable polarity changes