Mass flow sensor PFLOW301U-2210

airanalog outputsilicon

Measuring range [SCCM] 0...30 Output signal Linear, 1...5 VDC Accuracy [± % FS] max. 2.5 Supply voltage [VDC] 8...14 Humidity range 0...100% RH, resistant to water condensationWetted materials Silicon carbide, epoxy, PPS, FR4, silicone as static sealSupplier Angst+Pfister Sensors and Power Description The PFLOW series of mass airflow sensors incorporate the latest MEMS and microelectronics innovations. The sensor die uses a pair of thermopiles to detect changes in temperature gradient caused by mass flow, delivering ultra-low noiseto-signal, and unsurpassed repeatability. The “solid state” thermal isolation on the sensor die eliminates the need for surface cavities or fragile membranes, used in competing solutions, making the sensor resistant to clogging and pressure shock. The sensor’s internal signal conditioning circuitry leverages an off-the-shelf microcontroller, providing proven reliability and low cost. The PFLOW series of mass airflow sensors covers the ranges from 10 sccm to 2000 sccm. The sensors are fully calibrated and compensated over the temperature range of 0 to 50 °C (32 to 122 °F). The linearized analog output (1 to 5 V) provides customers with maximum flexibility and ease-of-use. Bidirectional air flow versions are available upon request. Consult PEWATRON