FMS clean environment online monitoring system mainly consists of five major parts: measuring sensor, vacuum pump control system, network cabinet, alarm system and upper computer monitoring software, which can realize real-time monitoring of cleanliness, temperature and humidity, differential pressure, wind speed and other parameters in the clean room, and complete data storage and management functions.
During the production process, the conditions of the surrounding environment are usually constantly changing, and manual monitoring cannot provide continuous monitoring data, so it is impossible to estimate when the system deviates from the specified working conditions, much less the quality of the product. The clean environment online monitoring system avoids this shortcoming of manual monitoring by installing multiple remote particle sensors at various points, where the sensors measure in real time and transmit the measurement results to a computer. Temperature, humidity and differential pressure, wind speed, floating bacteria count, etc. are all measured by the relevant probes.
2. Sensitivity: 0.3μm
3. Two channels: 0.5μm, 5.0μm (optional 0.3μm, 0.5μm)
4. Data display: on-site real-time data LCD / without display
5. Communication mode: standard Modbus-TCP, Modbus-RTU protocol or 0-5V, 4-20mA analog output
6.Sampling flow rate: 2.83L/min or 28.3L/min
7. Counting efficiency: 50%@0.3μm (in accordance with JIS)
8. Flow rate error: ±5%
9. Allowable large sampling concentration: 35000pcs / L
10.Light source: laser diode
11.Vacuum source: built-in air pump / external air pump
12.Aluminum alloy shell + stainless steel protective case
13.Power supply: 220V±10%, 50Hz±2Hz