Gas pressure controller PC series

flowprecision

Accuracy under pressure. Precision under control. The PC100 Series pressure controllers and meters combine a host of high-performance technology features to deliver a new level of pressure control accuracy and reliability to demanding semiconductor, vapor deposition and other ultra-precise manufacturing processes. Built on the proven Brooks GF100 mass flow controller technology, the PC100 Series features a high-purity all-metal flow path, enhanced sensor technology engineered specifically to eliminate sensor drift and a user interface and device diagnostics capability that makes it much easier to conduct device evaluation and troubleshooting, resulting in limited service interruption and reduced downtime. Features • Response time: <1 second • Full-scale flow rates up to 10 slm • Transducer pressure range: 1000 Torr FS • All-metal seal flow path: 5µ inch Ra surface finish • PC125 with embedded flow meter includes a highly corrosion-resistant Hastelloy® C-22 flow sensor combined with high-speed ARM processor • Fast-acting diaphragm-free valve assembly • High-visibility LCD display with easily accessible push button for local indication of flow, temperature and network address • Independent diagnostic/service port • DeviceNet™ protocol Benefits High-performance components enable fast response and setting time for improved pressure control Reduced diverted gas consumption and associated abatement costs All metal, corrosion resistant SEMI F20 compliant wetted flow path with overall reduced surface area and un-swept volumes ensures faster dry-down during purge steps Long-term thermal or pressure sensor device stability maximizes yield and throughput