Pirani vacuum gauge BVT200

capacitance diaphragmdigitalRS485

Establish new standards with the VersaTorr BVT200/225 Series Pirani transducer. This is an all-in-one wide range measurement solution for a broad selection of vacuum applications. It differentiates from any other vacuum gauges by offering an overall cost-effective gas independent measurement from 5.0E-3 to 1333 mbar in combination with measurement down to 1E-6 mbar by use of the heat-loss principle. In vacuum applications where the gas composition or type can change, traditional gas dependent Pirani gauges will result in measurement deviation from the actual pressure. The Tri- Sensor transducer uses a precision capacitance diaphragm gauge (CDG) sensor that eliminates the gas dependency and provides accurate measurements also when the gas properties change. The integrated heat-loss MEMS Pirani sensor extends the measuring range down to 1E-6 mbar and provides a novel automatic zero adjustment of the capacitance manometer that eliminates the common needs for manual zero adjustment of traditional capacitance diaphragm gauges. Features & Benefits Ultra-wide measuring range of 9 decades Capacitance diaphragm adds increased accuracy at 0.5% through low vacuum range 6 decades of gas independent measurement from 5E-3 to 1333 mbar Automatic zeroing of capacitance manometer Vacuum temperature sensor for diagnostics Applications Load locks Transfer chambers Forelines Vacuum roughing lines Thin film processing