Capacitance meter XacTorr®

Minimize drift and thermal effects. Maximize vacuum process results. Maximize the efficiency and performance of your vacuum-dependent processes: Choose XacTorr® Series digital vacuum capacitance manometers from Brooks Instrument. XacTorr® Series devices incorporate industry-leading features that improve measurement reliability, minimize drift, resist diaphragm contamination and minimize thermal effects. The advanced Mark-IV sensor contains surface areas not used in pressure measurement – providing locations for particles and condensable vapors to accumulate. This reduces the need to re-zero the gauge and increases sensor life without risking sensor drift. Additionally, an optional fast response sensor is available for superior closed loop control performance. The result: ultra-accurate, repeatable and efficient vacuum measurement that ensures each time you evacuate a chamber, it reaches the precise Torr your process requires for clean, contaminant-free production. Features • Available for process ranges from 0.10 Torr to 1000 Torr • Multiple accuracy levels available • Patented Mark IV sensor • Digital architecture enables operation over a wide dynamic range with extremely good accuracy • Dual-zone temperature control improves measurement stability and repeatability • Multi-decade digital calibration provides superior window of known accuracy • Intelli-touch zero adjustment • Independent & easily accessible diagnostic service port • DeviceNet® and analog communication options Benefits Lower drift, superior protection from deposition of process gases Elimination of manual potentiometers and drift associated with electronics