Screw vacuum pump COBRA BC 0600 F

drycompact

COBRA BC 0600 F Efficient: Cost-effective, long uptime, energy-efficient Easy servicing: Long service intervals Reliable: Operationally reliable Flexible: Application-oriented Quiet: Noise level < 62 dB(A) The COBRA BC 0600 F is a proven dry screw vacuum pump within the COBRA BC series portfolio. It offers best-in-class pumping speeds for the most demanding solar, flat panel and semiconductor applications. The COBRA BC series offers excellent powder and particulate handling capabilities due to its unique screw design. The proven design combines backing pump and vacuum booster in one compact frame. COBRA series vacuum pumps offer reduced ownership costs. High-efficiency motors and an idle mode feature increase the energy efficiency. Additional savings are realized through increased uptime and a reduced footprint, making retrofitting easier in many instances. Applications Load lock (conditional) Transfer Metrology Lithography Physical Vapor Deposition (PVD) Rapid Thermal Annealing (RTA) Strip/Ashing Oxide Etch Silicon Etch Metal Etch Technical specifications The COBRA BC 0600 F screw vacuum pump operates with two screw rotors rotating in opposite directions. This traps the medium to be pumped between the cylinder and the screw chambers and transports it to the gas discharge. The screw mechanism minimises sliding areas inside the pump and thus has optimum powder handling and restart capabilities.