The Hybrid 3D optical profilometer Superview WT series is used for sub nanometer measurement of surfaces of various precision components and materials. It integrates the performance characteristics of two high-precision 3D measuring instruments, white light interferometer and confocal microscope, and can perform non-contact scanning of the samples surface then re-establish 3D surface image. When measuring the ultra smooth and transparent surfaces, white light interferometry mode can be used to obtain high-precision and distortion-free images, and analyze parameters such as roughness. When measuring coarse surfaces with sharp angle features, confocal microscopy mode can reconstruct large angle 3D topography images, and 2D & 3D parameters reflecting surface quality are obtained by data processing and analysis of surface 3D images through software.