NDIR gas sensor Gasboard-2061

for process measurementfor semiconductor gas purification monitordigital

Product Overview
Gasboard-2061 is a high-performance WF6 gas sensor designed for real-time semiconductor chamber cleaning endpoint detection (EPD) in tungsten CVD (WCVD) deposition chambers. Based on Non-Dispersive Infrared (NDIR) technology, Gasboard-2061 enables highly sensitive and accurate WF6 concentration measurement under complex process conditions. By tracking WF6 concentration changes in real time, Gasboard-2061 enables precise and timely endpoint indication, helping to reduce cleaning time and over-cleaning gas consumption, while minimizing chamber wear and extending the lifetime of critical system components.

Designed with a compact modular architecture, Gasboard-2061 allows easy installation. It supports both analog and digital communication interfaces, enabling calibration and adjustment for convenient integration and maintenance.

Features

• NDIR technology for high sensitive and accurate WF6 measurement.
• Rapid response for real-time concentration change tracking.
• Low zero drift and high repeatability for consistent measurement performance.
• Robust sealing design for stable operation in vacuum environments.
• 316L corrosion-resistant construction for durability in harsh process conditions.
• Analog and digital communication interfaces for convenient integration and maintenance.

Specifications
Measurement component: WF6
Range: 0–200 mTorr
Repeatability: ±0.5%
Accuracy: ±1% F.S.
Operating voltage: 24 VDC
Operating current: 1.5 A (max)
Analog output: 0–5 VDC (4 ch) or 4–20 mA (4 ch)
Analog input: 0–10 VDC (1 ch)
Digital output: 4 ch; Digital input: 1 ch
Communication: RS485
Sampling port: NW25
Leak rate: ≤1 × 10⁻⁶ Pa·m³/s (He)
Operating ambient temperature: 20–35 ℃

Notes
1. All data in the table are measured under standard atmospheric pressure.
2. Measurement standard gases are provided by institutions certified by national metrology authorities. All gases are diluted in dry nitrogen with a purity of ≥99.999%.
3. The above performance is determined after calibration. All sensors are 100% calibrated during production.
4. Measurements are conducted at 25 °C ambient temperature.