SELL YOUR PRODUCTS
*mydirectindustry  
English

XYZ stage
linearpiezoelectric3-axis

XYZ stage
XYZ stage
Add to favorites
Compare this product

Characteristics

Orientation
XYZ, linear
Type
piezoelectric
Number of axes
3-axis

Description

3-axis Stage for Vacuum When one of DSM's customers required a custom three-axis positioning system, DSM leveraged the flexure-based design of its flextensional piezo actuators to create independent X, Y, and Z stages. The resulting X and Y stages each provide 200 microns of travel, and the Z axis has a stroke of 500 microns. The original stage assembly was designed for vacuum compatibility and was provided with benchtop models of DSM's VF linear piezo amplifier. The basic design of the stage systems is scalable to smaller/larger displacement capabilities. As a follow-on deliverable to the original, open-loop XYZ system above, DSM's customer requested closed-loop capability for the X and Y axes. DSM incorporated capacitive probes and used SA-100 linear servo amplifiers to provide stand-alone servo control. A 24-bit analog input accepts the position target signal, and digital I/O provides flags for "in-range" and data acquisition triggers.

Catalogs

*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.