Degassing unit LiquidLens™ LLD2
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Description
LiquidLens™ LLD2 UPW Degassing System
UPW degassing for immersion lithography scanners
The LiquidLens LLD2 system provides stability and purity of fluid lens by reducing dissolved gas and monitoring the UPW quality
Continuously maintains targeted temperature and pressure level of the outlet UPW stream
Ensures process and machine safely with safety alarms and leak sensors
Provides real-time monitoring of critical parameters on tool and on customers central monitoring system.
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.