Closed-loop flow regulator CFR – P377

for airfor compressed airfor gas

Miniature integrated high stability closed loop flow regulator. It can replace mass flow controllers or manifolds including proportional valve, flow sensor and control electronics. Accepts wide input pressure range and gives stable, precise outlet flow. Flow range goes from 1 ml/min up to 10 l/min depending on orifice. 0-5V input voltage or UART communication to set and read the flow. Eliminates dead volume between the test volume and the regulator. Very low power (< 1 W). Applications: gas analyser, instrumentation, bio-reactor, semiconductor process chamber. Can be customized to the required fluidic connections and flow rates.