PVD deposition machine HD500

Product overview
The HD500 is built on a composite coating technology platform that integrates high-ionization magnetron sputtering (HiPIMS) and multi-arc ion plating in a single process framework. It produces versatile thin films adapted to hard-to-coat materials such as stainless steel and titanium alloys, contributing to extended component service life. The system is suitable for small-scale production and process development.

Key advantages

• Lateral etching with hot-filament ion source: delivers uniform lateral etch, controlled overhang and simplified maintenance.
• Composite HiPIMS magnetron sputtering: DC + HiPIMS magnetrons achieve high deposition rates while providing required ion energy for refractory elements (Nb, B, C, W, V) and a wide range of coating materials.
• Plasma-optimized multi-arc source: three groups of six circular multi-arc targets with concealed arc ignition for reliable operation and easy maintenance; enables multi-element and multi-layer deposition with smooth film surfaces and high target utilization.
• Multiple deposition platforms on one frame: DC MS + HiPIMS MS + multi-arc ion plating allow single, composite and mixed coating processes within the same batch.

Product Parameters
Name: HD500
Coating technology: Composite coating technology (high-ionization sputtering + arc composite)
Etching: Lateral ion source (hot filament)
Multi-arc sources (number): 6
Magnetron cathodes (number): 1
Equipment size (mm): 3400 × 1600 × 2600
Chamber volume (m³): 0.7
Effective coating area (mm): Φ410 × 400
Max working temperature (°C): 700
Loading capacity (number of trees): 5
Blade loading (APMT1135): 6000 pcs
Rod blade loading (D4*50L): 1800 pcs
Max loading weight (kg): 300
Shaft diameter: Φ130
Process time (AlTiN): 6-8 h

Technical specifications

• Model / Series: HD500 (HD Series)
• Coating technology: Composite high-ionization sputtering + arc
• Etching method: Lateral ion source (hot filament)
• Multi-arc sources: 6 (3 groups of 6 circular targets)
• Magnetron cathodes: 1
• Equipment dimensions: 3400 mm × 1600 mm × 2600 mm
• Chamber volume: 0.7 m³
• Effective coating area: Φ410 × 400 mm
• Max working temperature: 700 °C
• Loading capacity: 5 trees
• Blade loading (APMT1135): 6000 pcs
• Rod blade capacity (D4*50L): 1800 pcs
• Max loading weight: 300 kg
• Shaft diameter: Φ130
• Typical process time (AlTiN): 6-8 h